Figure 7
From: Thermally controlled widening of droplet etched nanoholes
AlGaAs surfaces after droplet etching, annealing, and overgrowth. (a) AFM micrograph of an AlGaAs surface (35% Al content) after Ga droplet etching and 120-s annealing at T = 680℃. (b) AFM micrograph of an AlGaAs surface after Ga droplet etching and 1,800-s annealing at T = 680℃. (c) AFM micrograph of sample where large holes (see Figure 4) are overgrown with 20-nm AlGaAs (35% Al content). (d) Color-coded micrograph of a single hole from (c). (e) AFM linescans of the hole from (d).