Table 1 Parameters summary for the IBM process in this work
From: Fabrication and characterization of well-aligned plasmonic nanopillars with ultrasmall separations
Parameter | Value | Unit |
---|---|---|
Voltage | 300 | V |
Current | 200 | mA |
Suppressor | 150 | V |
Discharge | 60 | V |
Magnet current | 485 | mA |
Flow rate | 30 | sccm |