Figure 3From: Copper pillar and memory characteristics using Al2O3 switching material for 3D architectureAFM and HRTEM images for TiN layer. (a) Atomic force microscope (AFM) image shows surface roughness of TiN layer with a scan area of 1× 1 μm2. (b) The TiN surface is oxidized and is observed by high-resolution transmission electron microscope (HRTEM) image.Back to article page