Figure 1

Schematic diagram of the fabrication of terminals on a SWNT using shadow mask evaporation technique. (i) A metal mask for catalyst pattern is set just above the substrate, and cobalt catalyst is thermally evaporated. (ii) Deposited Co catalyst pad on the substrate. (iii) After CVD, SWNT is grown horizontally from the catalyst pad. (iv) A metal mask for electrodes is set just above the substrate. (v) After evaporation, electrodes are set on the SWNT. (vi) Optical microscopy image of fabricated terminals. The scale bar is 200 μm.