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Figure 5 | Nanoscale Research Letters

Figure 5

From: Dielectric properties of porous silicon for use as a substrate for the on-chip integration of millimeter-wave devices in the frequency range 140 to 210 GHz

Figure 5

PSi dielectric permittivity and loss tangent in frequency ranges 1 to 40 GHz and 140 to 210 GHz. The curves depict PSi dielectric permittivity (a) and loss tangent (b), extracted from broadband electrical measurements combined with simulations of CPW TLines integrated on the PSi substrate for the frequency ranges 1 to 40 GHz and 140 to 200 GHz.

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