Figure 2From: Released micromachined beams utilizing laterally uniform porosity porous siliconSEM images of released PS microbeams. Beam voltage of 5 kV. (a) Released doubly clamped microbeams; the length of the microbeams was 300 μm and the width was 25 μm; (b) broken PS microbeams which formed single end fixed beams.Back to article page