Figure 4From: Released micromachined beams utilizing laterally uniform porosity porous siliconSurface profile of released doubly clamped microbeam. (a) Plot of PS doubly clamped microbeam and Si substrate, (b) 3D plot of PS doubly clamped microbeam. The length of microbeam was 500 μm and the width was 25 μm.Back to article page