Table 1 Root-mean-square (RMS) roughness ( R q ) of various GaAs surfaces after 3-nm Au deposition
Surface | (211)B | (411)B | (511)B | (711)B | (811)B | (911)B |
---|---|---|---|---|---|---|
Rq [nm] | 0.361 | 0.264 | 0.232 | 0.351 | 0.347 | 0.269 |
Surface | (211)B | (411)B | (511)B | (711)B | (811)B | (911)B |
---|---|---|---|---|---|---|
Rq [nm] | 0.361 | 0.264 | 0.232 | 0.351 | 0.347 | 0.269 |