Figure 6
Structure wavelength and RMS roughness as a function of fluence for Xe + irradiated samples for fluences. Fluences are from Φ = 1.12 × 1017 cm-2 up to Φ = 1.35 × 1019 cm-2. Eion = 600 eV, ion incidence angle of α = 65° (a, b) and α = 75° (c, d).