Figure 8
Erosion velocity v and reflection coefficients R . Erosion velocity v (a) and reflection coefficients R (b) as function of incidence angle for different material systems with Xe at ion energy Eion = 600 eV based on TRIM.SP calculations [31]. The erosion velocity v was calculated using an ion current density of 300 μ A/cm2, the individual, angular dependent sputter yields (from TRIM.SP), and the atomic densities of the materials.