Figure 2

SEM images of the VACNT/parylene composite membrane. (a) SEM image of the top surface of VACNT/parylene composite membrane after parylene deposition. (b) SEM image of the top surface of VACNT/parylene composite membrane after annealing treatment (375°C for 1 h). (c) SEM image of the top surface of the VACNT/parylene composite membrane after Ar/O2 plasma etching.