Figure 5From: Improvement in the breakdown endurance of high-κ dielectric by utilizing stacking technology and adding sufficient interfacial layerC-V characteristics for samples with different EOTs due to different IL thicknesses. (a) C-V curves for SH/Ox with EOT ranging from 25 to 31 Å. The I-V curves with different EOTs are shown in the inset. (b) C-V curves for H/Ox with EOT ranging from 22 to 27 Å. The I-V curves with different EOTs are shown in the inset.Back to article page