Figure 9From: Improvement in the breakdown endurance of high-κ dielectric by utilizing stacking technology and adding sufficient interfacial layerC-V curves measured at various frequencies for H/O x . (a) EOT = 26 Å, having the least Dit; (b) EOT = 24 Å; (c) EOT = 23 Å; (d) EOT = 22 Å, having the highest Dit.Back to article page