Figure 3From: The interfaces of lanthanum oxide-based subnanometer EOT gate dielectricsXPS results showing the existence of interfacial silicate layer at the La 2 O 3 /Si interface. (a) La 3d spectra of the as-deposited sample. (b) La 3d spectra of the thermally annealed sample. (c) O 1s spectrum taken from the La2O3/Si interface region for the annealed sample.Back to article page