Table 1 Device characteristics and electrical parameters
From: Macroporous silicon for high-capacitance devices using metal electrodes
Ox. thick | Fill | Theory | Model | ||
|---|---|---|---|---|---|
t ox (nm) | L fill (nm) | C (μF) | C (μF) | ESR (Ω) | C sp (nF/mm2) |
90 | 150 | 5.09 | 4.64 | 1.08 | 36.4 |
33 | 130 | 11.67 | 11.39 | 1.12 | 83.4 |
24 | 130 | 15.97 | 15.48 | 1.09 | 109.7 |