Figure 3
XPS survey spectra of the BTO films. (a) As-deposited BTO, (b) BTO etched with the SF6/O2/Ar plasma, and (c) etched BTO after the post-annealing process.
Figure 3 | Nanoscale Research Letters
XPS survey spectra of the BTO films. (a) As-deposited BTO, (b) BTO etched with the SF6/O2/Ar plasma, and (c) etched BTO after the post-annealing process.