Table 1 XRD peak position of (002) diffraction and main lattice constants of InN films for our samples
Sample A | Sample B | Sample C | Sample E | Sample F | |
|---|---|---|---|---|---|
InN(002) (°) | 15.82 | 15.83 | 15.95 | 16.15 | 16.19 |
c(Å) | 5.68 | 5.67 | 5.63 | 5.57 | 5.56 |
InN(101) (°) | 16.65 | 16.60 | 16.53 | 16.43 | 16.37 |
d101 (Å) | 2.70 | 2.71 | 2.72 | 2.73 | 2.74 |
a(Å) | 3.54 | 3.56 | 3.58 | 3.61 | 3.63 |