Figure 3

EFTEM images obtained from SRO thin films. Focusing silicon agglomerates, under different thermal treatment temperatures and times and varying the relationships Ro. (a) Ro = 10, T = 1,100°C, 60 min (scale 10 nm), (b) Ro = 10, T = 1,100°C, 60 min (scale 20 nm), (c) Ro = 20, T = 1,100°C, 60 min (scale 20 nm), (d) Ro = 20, T = 1,250°C, 60 min (scale 20 nm), and (e) Ro = 30, T = 1,100°C, 60 min (scale 20 nm).