Figure 4From: Comparative analysis of barium titanate thin films dry etching using inductively coupled plasmas by different fluorine-based mixture gasThe surface morphologies of the BaTiO 3 films, which are under the unetched and etched by each fluorine-based plasmas. (a, b, c, d) The AFM top views of the selected areas and (a-1 to d-1) the corresponding cross-sectional surface line profiles of BaTiO3 thin films under different conditions.Back to article page