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Figure 5 | Nanoscale Research Letters

Figure 5

From: Comparative analysis of barium titanate thin films dry etching using inductively coupled plasmas by different fluorine-based mixture gas

Figure 5

XPS survey spectrum of BaTiO 3 thin films and F 1 s narrow-scan spectrum for each BaTiO 3 thin films. (a) XPS survey spectrum of BaTiO3 thin films: (1) as-deposited, (2) etched in the CF4/O2 plasma, (3) etched in the C4F8/O2 plasma, and (4) etched in the SF6/O2 plasma. (b) F 1 s narrow-scan spectrum for each BaTiO3 thin films. The vertical dashed line indicates each maximal position of the F 1 s singlet.

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