Figure 5
XPS survey spectrum of BaTiO 3 thin films and F 1 s narrow-scan spectrum for each BaTiO 3 thin films. (a) XPS survey spectrum of BaTiO3 thin films: (1) as-deposited, (2) etched in the CF4/O2 plasma, (3) etched in the C4F8/O2 plasma, and (4) etched in the SF6/O2 plasma. (b) F 1 s narrow-scan spectrum for each BaTiO3 thin films. The vertical dashed line indicates each maximal position of the F 1 s singlet.