The narrow-scan spectra of (a) Ba 3d , (b) Ti 2p , (c) O 1 s and (d) F 1 s peaks for each BaTiO
film. (1) As-deposited, (2) etched in the CF4/O2 plasma, (3) etched in the C4F8/O2 plasma, and (4) etched in the SF6/O2 plasma. Red bold solid lines represent the fitted experimental results after subtracting Shirley-type background. Peaks with dashed line are fitted sub-peaks. Peak positions of the Ba 3d, Ti 2p, O 1 s and F 1 s are the average peak positions for the corresponding sub-peaks. The broken lines reveal the approximate chemical shifts.