Figure 9From: Quartz resonator assembling with TSV interposer using polymer sealing or metal bondingVector network analyzer with pi circuits, results of TSV interposer, and response output versus frequency with TSV interposer. (a) Vector network analyzer with pi circuits, (b) measured results of TSV interposer with 26 and 37 MHz quartz resonator, and (c) the response output versus frequency of two standards of quartz resonator with TSV interposer.Back to article page