Table 1 The pressure of chamber during the growth
H2flow rate (sccm) | Total pressure/H2partial pressure (mTorr) |
---|---|
10 | 353/16.8 |
100 | 792/364 |
200 | 980/264 |
300 | 998/598.8 |
400 | 2,470/1,646.7 |
500 | 2,780/1,985.7 |
H2flow rate (sccm) | Total pressure/H2partial pressure (mTorr) |
---|---|
10 | 353/16.8 |
100 | 792/364 |
200 | 980/264 |
300 | 998/598.8 |
400 | 2,470/1,646.7 |
500 | 2,780/1,985.7 |