Figure 2From: Vertical nanowire probes for intracellular signaling of living cellsSEM images and a schematic bird's eye view of the build-up procedure of the vertical nanowire probe electrode. (a,b,c,d) SEM images of the build-up procedure of the vertical nanowire probe electrode ((a) selected vertical nanowire, (b) bottom passivation layer preventing electrical leakage, (c) Pt deposition for electrode formation, (d) top passivation layer for intracellular recording, scale bar is 2 μm]. (e,f,g,h) A schematic bird's eye view of the build-up procedure of the vertical nanowire probe electrode (inset: cross-sectional view).Back to article page