Table 1 Scattering intensity j ∈ { p , s }, of NRA, measured using integrating sphere for forward scattering
Forward scattering | 169-nm thick | 198-nm thick | 269-nm thick |
---|---|---|---|
S normal-p | 3.5 (a.u.) | 3.7 (a.u.) | 5.5 (a.u.) |
S normal-s | 5.0 (a.u.) | 6.8 (a.u.) | 12.1 (a.u.) |