Table 2 The characteristics of porous layer structure
From: Fabrication of uniform 4H-SiC mesopores by pulsed electrochemical etching
Sample number | Cap and transition layer (μm) | Characteristics of mesopores | ||
|---|---|---|---|---|
Length of mesopores (μm) | Mesopore diameter in the middle (nm) | Mesopore diameter in the bottom (nm) | ||
#1 | 1 (±0.3) | 19 (±0.5) | 19 (±5) | 33 (±5) |
#2 | 1 (±0.3) | 19 (±0.5) | 19 (±5) | 19 (±5) |
#3 | 1 (±0.3) | 19 (±0.5) | 19 (±5) | 33 (±5) |
#4 | 1 (±0.3) | 19 (±0.5) | 19 (±5) | 19 (±5) |
#5 | 1 (±0.3) | 19 (±0.5) | 19 (±5) | 38 (±5) |
#6 | 1 (±0.3) | 19 (±0.5) | 19 (±5) | 19 (±5) |
#7 | 1 (±0.3) | 19 (±0.5) | 19 (±5) | 33 (±5) |