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Table 2 The characteristics of porous layer structure

From: Fabrication of uniform 4H-SiC mesopores by pulsed electrochemical etching

Sample number Cap and transition layer (μm) Characteristics of mesopores
Length of mesopores (μm) Mesopore diameter in the middle (nm) Mesopore diameter in the bottom (nm)
#1 1 (±0.3) 19 (±0.5) 19 (±5) 33 (±5)
#2 1 (±0.3) 19 (±0.5) 19 (±5) 19 (±5)
#3 1 (±0.3) 19 (±0.5) 19 (±5) 33 (±5)
#4 1 (±0.3) 19 (±0.5) 19 (±5) 19 (±5)
#5 1 (±0.3) 19 (±0.5) 19 (±5) 38 (±5)
#6 1 (±0.3) 19 (±0.5) 19 (±5) 19 (±5)
#7 1 (±0.3) 19 (±0.5) 19 (±5) 33 (±5)