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Table 1 The photovoltaic parameters for the nano/micro hole array Si solar cell with different etching times

From: Periodic nano/micro-hole array silicon solar cell

Etching time (min)

Jsc (mA/cm2)

Voc (mV)

FF

η(%)

Rs (Ω)

Rsh (Ω)

Polish-Si

24.6

537

0.71

9.37

4.4

8,620

0.5

29.1

542

0.35

5.59

14.9

271

5

29.3

542

0.47

7.40

8.7

2,272

10

25.5

544

0.65

9.02

5.6

6,667

15

22.9

534

0.56

6.90

9.5

4,237

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