Table 1 The photovoltaic parameters for the nano/micro hole array Si solar cell with different etching times
Etching time (min) | Jsc (mA/cm2) | Voc (mV) | FF | η(%) | Rs (Ω) | Rsh (Ω) |
---|---|---|---|---|---|---|
Polish-Si | 24.6 | 537 | 0.71 | 9.37 | 4.4 | 8,620 |
0.5 | 29.1 | 542 | 0.35 | 5.59 | 14.9 | 271 |
5 | 29.3 | 542 | 0.47 | 7.40 | 8.7 | 2,272 |
10 | 25.5 | 544 | 0.65 | 9.02 | 5.6 | 6,667 |
15 | 22.9 | 534 | 0.56 | 6.90 | 9.5 | 4,237 |