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Table 1 The photovoltaic parameters for the nano/micro hole array Si solar cell with different etching times

From: Periodic nano/micro-hole array silicon solar cell

Etching time (min) Jsc (mA/cm2) Voc (mV) FF η(%) Rs (Ω) Rsh (Ω)
Polish-Si 24.6 537 0.71 9.37 4.4 8,620
0.5 29.1 542 0.35 5.59 14.9 271
5 29.3 542 0.47 7.40 8.7 2,272
10 25.5 544 0.65 9.02 5.6 6,667
15 22.9 534 0.56 6.90 9.5 4,237