Table 2 The depth of hole at specific etching time and the corresponding wavelength with the same absorption depth
Etching Time (min) | |||||
---|---|---|---|---|---|
0.5 | 1 | 5 | 10 | 15 | |
Depth (μm) | 0.394 | 0.6 | 3.06 | 5.19 | 7.5 |
Wavelength (nm) | 450 | 470 | 620 | 690 | 750 |
Etching Time (min) | |||||
---|---|---|---|---|---|
0.5 | 1 | 5 | 10 | 15 | |
Depth (μm) | 0.394 | 0.6 | 3.06 | 5.19 | 7.5 |
Wavelength (nm) | 450 | 470 | 620 | 690 | 750 |