RRAM characteristics using a new Cr/GdOx/TiN structure

Table 1 Weight and atomic percentages

EDX spectra taken in Figure2c	Element	Weight (%)	Atomic (%)
1	Cr	96.5	93.7
2	Gd	80.5	32.7
2	O	13.3	53.1
3	Gd	84.9	39.8
3	O	11.2	51.6
4	Ti	38.2	40.2
4	O	12.0	37.7
5	Ti	70.5	43.6
5	N	23.9	50.5

All elements in the Cr/GdO_x/TiN RRAM device at different positions, as marked in Figure 2c, are shown.