Figure 2From: Investigation of hydrogen plasma treatment for reducing defects in silicon quantum dot superlattice structure with amorphous silicon carbide matrixArrhenius plot of diffusion coefficient of hydrogen in Si-QDSLs. The calculated diffusion coefficients of single-crystal silicon by van Wieringen et al. [22] and the estimated diffusion coefficients of an a-SiC thin film with hydrogen concentration of 0.4 ± 0.1 at.% by Schmidt et al. [23] are also described.Back to article page