Figure 2From: Enhancement of antireflection property of silicon using nanostructured surface combined with a polymer depositionTilted FESEM images of the Si nanostructures etched by various flow rates of mixture gas. (a) 0.5 sccm. (b) 2.5 sccm. (c) 5.0 sccm. Inset: magnified FESEM images of the aggregate of nanoparticles.Back to article page