Figure 3From: Stepwise mechanism and H2O-assisted hydrolysis in atomic layer deposition of SiO2 without a catalyst Gibbs free energy profile of the SiCl 4 half-reaction of SiO 2 ALD. The inset shows the structures of four transition states, TS1A1, TS2A1, TS1A2, and TS2A2, two pentacoordinated intermediates, Im2A1 and Im1A2, and two products, PA1 and PA2.Back to article page