Figure 4From: Stepwise mechanism and H2O-assisted hydrolysis in atomic layer deposition of SiO2 without a catalyst Gibbs free energy profiles of the hydrolysis reactions of -O 2 SiCl 2 * , B1 and B2, in H 2 O half-reaction. The inset shows the structures of three transition states, TS1B1, TS1B2, and H2O-assisted-TS1B1, and two products, PB1 and PB2.Back to article page