Figure 5From: Stepwise mechanism and H2O-assisted hydrolysis in atomic layer deposition of SiO2 without a catalyst Gibbs free energy profiles of the hydrolysis reactions of -OSiCl 3 * , B3, B4, and B5, in H 2 O half-reaction. The inset shows the structures of seven transition states, TS1B3, TS2B3, TS1B4, TS2B4, TS1B5, TS2B5, and H2O-assisted-TS2B3, a pentacoordinated intermediate, H2O-assisted-Im2B3, and three products, PB3, PB4, and PB5.Back to article page