Figure 6From: Stepwise mechanism and H2O-assisted hydrolysis in atomic layer deposition of SiO2 without a catalyst Gibbs free energy profiles of H 2 O condensation reactions, B6, B8, and B10, in H 2 O half-reaction. The inset shows the structures of six transition states, TS1B6, TS2B6, TS1B8, TS2B8, TS1B10, and TS2B10.Back to article page