Figure 7From: Stepwise mechanism and H2O-assisted hydrolysis in atomic layer deposition of SiO2 without a catalyst The Gibbs free energy profiles of HCl condensation reactions, B7 and B9, in H 2 O half-reaction. The inset shows the structures of four transition states, TS1B7, TS2B7, TS1B9, and TS2B9.Back to article page