Table 1 Thickness of samples by Cauchy dispersion relation
From: Optical properties and bandgap evolution of ALD HfSiOx films
Thickness (nm) | MSE | |
|---|---|---|
HfO2 | 9.80 ± 0.015 | 0.613 |
(HfO2)0.95(SiO2)0.05 | 12.00 ± 0.020 | 0.983 |
(HfO2)0.8(SiO2)0.2 | 10.39 ± 0.021 | 0.810 |
(HfO2)0.6(SiO2)0.4 | 9.36 ± 0.026 | 1.035 |
(HfO2)0.4(SiO2)0.6 | 8.80 ± 0.026 | 1.019 |
(HfO2)0.2(SiO2)0.8 | 11.36 ± 0.039 | 0.661 |
SiO2 | 11.13 ± 0.049 | 0.641 |