Figure 9From: Atomic layer deposition for fabrication of HfO2/Al2O3 thin films with high laser-induced damage thresholds SEM images for HfO 2 /Al 2 O 3 anti-reflector damage morphology. (a) Damage spot. (b) Surface morphology of the anti-reflector. (c, d) Magnified image of the edge of the damage spot.Back to article page