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Figure 8 | Nanoscale Research Letters

Figure 8

From: Structure and photoluminescence of the TiO2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone

Figure 8

Room-temperature PL spectra of the TiO 2 films annealed at different temperatures in N 2 atmosphere. The as-grown TiO2 film is anatase deposited at a substrate temperature of 250°C. The insert is the areal percentages of the red emission band at 615 nm, the green emission band at 510 nm, and the near-infrared peak at 820 nm, which are derived from multiple-peak Gaussian fitting of the PL spectra, respectively.

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