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Figure 9 | Nanoscale Research Letters

Figure 9

From: Structure and photoluminescence of the TiO2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone

Figure 9

XPS spectra of Ti 2p states from the TiO 2 films. Samples were annealed at 1,000°C after removing 3-nm surface layer by Ar+ ion sputtering (a); annealed at 1,000°C without Ar+ ion sputtering (b); and annealed at 800°C without Ar+ ion sputtering (c). The dashed curves are multiple-peak Gaussian fitting of the Ti 2p3/2 peak with two components from the valence states of Ti4+ (blue) and Ti3+ (red).

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