Figure 3From: Effects of doping and annealing on properties of ZnO films grown by atomic layer deposition SEM images. (a) As-grown ZnO and (b) 3 at.% Al-doped ZnO films. High resolution images are also inserted; (c) undoped and (d) 3 at.% Al-doped films annealed in air; (e) undoped and (f) 3 at.% Al-doped ZnO film annealed in Ar.Back to article page