Figure 5From: Effects of doping and annealing on properties of ZnO films grown by atomic layer deposition Absorption spectra and optical bandgap of as-grown films. (a) Absorption spectra of as-grown undoped and Al-doped ZnO films; (b) the variation of ZnO optical bandgap with doped Al concentrations derived by Tauc’s relationship, calculated by Vagard’s law, and fitted by polynomial function.Back to article page