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Table 1 Lattice Al concentration before and after annealing in different ambients

From: Effects of doping and annealing on properties of ZnO films grown by atomic layer deposition

Al-doped ZnO Al concentration (at.%)
Before annealing 1 2 3 4
Annealed in air 0.3 1.0 2.0 3.0
Annealed in N2 0.3 1.2 2.2 3.2
Annealed in Ar 0.3 1.2 2.3 3.4