Table 1 Lattice Al concentration before and after annealing in different ambients
From: Effects of doping and annealing on properties of ZnO films grown by atomic layer deposition
Al-doped ZnO | Al concentration (at.%) | |||
|---|---|---|---|---|
Before annealing | 1 | 2 | 3 | 4 |
Annealed in air | 0.3 | 1.0 | 2.0 | 3.0 |
Annealed in N2 | 0.3 | 1.2 | 2.2 | 3.2 |
Annealed in Ar | 0.3 | 1.2 | 2.3 | 3.4 |