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Table 2 Photovoltaic performance for PERC cells with various rear-side passivation films

From: Investigation on the passivated Si/Al₂O₃ interface fabricated by non-vacuum spatial atomic layer deposition system

Cell type	V _oc (V)	J _sc (mA/cm ² )	FF	Efficiency (%)
A	0.619	37.6	0.78	18.15
B	0.623	37.7	0.782	18.36
C	0.618	37.2	0.748	17.2
D	0.647	38.2	0.776	19.18

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