Table 1 Thickness deviation and GPC vary on different plasma powers
Plasma power (W) | Standard deviation | GPC ( nm/cycle ) |
|---|---|---|
80 | 0.353 nm (2.0%) | 0.131 |
45 | 0.155 nm (0.7%) | 0.111 |
Plasma power (W) | Standard deviation | GPC ( nm/cycle ) |
|---|---|---|
80 | 0.353 nm (2.0%) | 0.131 |
45 | 0.155 nm (0.7%) | 0.111 |