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Table 2 A summary of the surface film characteristics after deposition by ALD/MLD

From: A flexible transparent gas barrier film employing the method of mixing ALD/MLD-grown Al2O3 and alucone layers

Film code Thickness (nm) Normalized growth rate (Å/per cycle) RMS roughness (nm) Contact angle (°)
A 52.137 ± 0.034 0.947 ± 0.001 0.503 ± 0.011 65.3 ± 3.7
B 53.693 ± 0.156 1.161 ± 0.003 0.492 ± 0.002 95.1 ± 3.3
C 54.956 ± 0.067 1.153 ± 0.001 0.465 ± 0.012 86.5 ± 1.4