Table 1 Thickness (measured by SE) of the as-grown and annealed samples discussed in this work
Sample | Number of ALD Al 2 O 3 cycles | Thickness as-grown (nm) | Thickness after RTA (nm) |
|---|---|---|---|
S1 | 0 | 8.2 | 8.6 |
S2 | 5 | 8.4 | 8.7 |
S3 | 10 | 8.8 | 9.0 |
S4 | 15 | 9.3 | 9.5 |
Sample | Number of ALD Al 2 O 3 cycles | Thickness as-grown (nm) | Thickness after RTA (nm) |
|---|---|---|---|
S1 | 0 | 8.2 | 8.6 |
S2 | 5 | 8.4 | 8.7 |
S3 | 10 | 8.8 | 9.0 |
S4 | 15 | 9.3 | 9.5 |