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Table 2 Thickness variation of nano-oxide thin films in the MCP pores

From: Nano-oxide thin films deposited via atomic layer deposition on microchannel plates

Description Thicknesses of coatings located in different locations of a pore (nm) Average value (nm) Uniformity (%)
Top part Bottom part
Condition 1 91.3 92.2 92.4 91.5 86.6 92.1 92.9 93 91.5 2.26
Condition 2 102.2 106.4 106.5 105.2 105.9 107.1 105.7 107.4 105.8 1.53
Condition 3 122.1 124.2 125.6 121.5 122.9 121.0 121.1 121.6 122.5 1.34
Condition 4 247.1 251.4 252.5 247.7 246.9 252.2 245.9 250.7 249.3 1.07
  1. Uniformity = (Standard variation/Average variation) × 100%. Standard variation calculation formula: \( S=\sqrt{\frac{1}{N-1}{\displaystyle {\sum}_{i=1}^N{\left({X}_i-\overline{X}\right)}^2}} \); average variation calculation formula: \( \frac{X_1+{X}_2+\cdots {X}_N}{N} \).