Table 2 Thickness variation of nano-oxide thin films in the MCP pores
From: Nano-oxide thin films deposited via atomic layer deposition on microchannel plates
Description | Thicknesses of coatings located in different locations of a pore (nm) | Average value (nm) | Uniformity (%) | |||||||
|---|---|---|---|---|---|---|---|---|---|---|
Top part | Bottom part | |||||||||
Condition 1 | 91.3 | 92.2 | 92.4 | 91.5 | 86.6 | 92.1 | 92.9 | 93 | 91.5 | 2.26 |
Condition 2 | 102.2 | 106.4 | 106.5 | 105.2 | 105.9 | 107.1 | 105.7 | 107.4 | 105.8 | 1.53 |
Condition 3 | 122.1 | 124.2 | 125.6 | 121.5 | 122.9 | 121.0 | 121.1 | 121.6 | 122.5 | 1.34 |
Condition 4 | 247.1 | 251.4 | 252.5 | 247.7 | 246.9 | 252.2 | 245.9 | 250.7 | 249.3 | 1.07 |