FIB and TEM images for AAO template coated with TiO
using ALD. (a) Cross-sectional structure for the TEM samples. (b) The enlarged picture shows the barrier layer between the AAO template and Al substrate. (c) A cross section of the AAO and TiO2 arrays and EDX spectroscopic image for all elements for (c-1) O, (c-2) Al, and (c-3) Ti corresponding to the yellow line in (c).