Figure 1
Schematic diagrams illustrating the fabrication process for SiNC/PEDOT:PSS hybrid cell. (a) Monolayer PS nanospheres prepared on an n-type Si substrate. (b) O2 plasma treatment of the PS nanospheres to reduce their diameter. (c) Cl2 plasma etching of the Si substrate to form SiNCs. (d) Removal of the PS nanospheres. (e) Spin coating of the PEDOT:PSS layer on the SiNCs. (f) Deposition of silver grid and Ti/Pd/Ag as the front and rear electrodes, respectively, to complete the hybrid cell.